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20162019
most citedOn the Origins of Near-Surface Stresses in Silicon around Cu-filled and CNT-filled Through Silicon Vias

7 citations · 8 across the 3 of their papers we have counts for

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Showing 2019 · cond-mat.mtrl-sciShow all

1 paper · 2 filters

cond-mat.mtrl-sci2019★ 1 cited

Improved Thin Film Quality and Photoluminescence of N-Doped Epitaxial Germanium-on-Silicon using MOCVD

Guangnan Zhou, Alejandra V. Cuervo Covian, Kwang Hong Lee +4

Ge-on-Si structures in-situ doped with phosphorus or arsenic via metal organic chemical vapor deposition (MOCVD) were investigated. Surface roughness, strain, threading dislocation…