Reactivity of the Si(100)-2$\times$1-Cl surface with respect to PH${}_3$, PCl${}_3$, and BCl${}_3$: Comparison with PH${}_3$ on Si(100)-2$\times$1-H

T. V. Pavlova, K. N. Eltsov

Despite the interest in a chlorine monolayer on Si(100) as an alternative to hydrogen resist for atomic-precision doping, little is known about its interaction with dopant-containi…