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cond-mat.supr-con2022★ 12 cited
Ion-beam Assisted Sputtering of Titanium Nitride Thin Films
Timothy Draher, Tomas Polakovic, Juliang Li +10
Titanium nitride is a material of interest for many superconducting devices such as nanowire microwave resonators and photon detectors. Thus, controlling the growth of TiN thin fil…
cond-mat.supr-con2018★ 37 cited
Room temperature deposition of superconducting Niobium Nitride films by ion beam assisted sputtering
Tomas Polakovic, Sergi Lendinez, John E. Pearson +8
We use room temperature ion beam assisted sputtering (IBAS) to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport…