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20102026
most citedChemical mechanical polishing of thin film diamond

189 citations · 1k across the 27 of their papers we have counts for

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Showing 2014 · cond-mat.mtrl-sciShow all

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cond-mat.mtrl-sci2014★ 71 cited

Polishing of {100} and {111} single crystal diamond through the use of Chemical Mechanical Polishing

Evan L. H. Thomas, Soumen Mandal, Emmanuel B. Brousseau +1

Diamond is one of the hardest and most difficult to polish materials. In this paper, the polishing of {111} and {100} single crystal diamond surfaces by standard Chemical Mechanica…