107 citations · 289 across the 9 of their papers we have counts for
4 papers · 1 filter
Influence of Si doping and O2-flow on arc deposited (Al,Cr)2O3 coatings
Ludvig Landälv, Emmanuelle Göthelid, Jens Jensen +6
(Al,Cr)2O3 coatings with Al/(Al+Cr) = 0.5 or Al = 70 at.%, doped with 0, 5 or 10 at.% Si, were deposited on hard metal and Si(100) substrates to elucidate the influence of Si on th…
Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere
Martin Magnuson, Lina Tengdelius, Fredrik Eriksson +5
W-B-C films were deposited on Si(100) substrates held at elevated temperature by reactive sputtering from a W target in Kr/trimethylboron (TMB) plasmas. Quantitative analysis by X-…
Electronic excitation of transition metal nitrides by light ions with keV energies
Barbara Bruckner, Marcus Hans, Tomas Nyberg +3
We investigated the specific electronic energy deposition by protons and He ions with keV energies in different transition metal nitrides of technological interest. Data were obtai…
Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
Martin Magnusona, Lina Tengdelius, Grzegorz Greczynski +7
We investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 oC as well as the influence of the sputtering power at 8…