31 citations · 44 across the 2 of their papers we have counts for
8 papers
Influence of Si doping and O2-flow on arc deposited (Al,Cr)2O3 coatings
Ludvig Landälv, Emmanuelle Göthelid, Jens Jensen +6
(Al,Cr)2O3 coatings with Al/(Al+Cr) = 0.5 or Al = 70 at.%, doped with 0, 5 or 10 at.% Si, were deposited on hard metal and Si(100) substrates to elucidate the influence of Si on th…
Reactive magnetron sputtering of tungsten target in krypton/trimethylboron atmosphere
Martin Magnuson, Lina Tengdelius, Fredrik Eriksson +5
W-B-C films were deposited on Si(100) substrates held at elevated temperature by reactive sputtering from a W target in Kr/trimethylboron (TMB) plasmas. Quantitative analysis by X-…
Electronic excitation of transition metal nitrides by light ions with keV energies
Barbara Bruckner, Marcus Hans, Tomas Nyberg +3
We investigated the specific electronic energy deposition by protons and He ions with keV energies in different transition metal nitrides of technological interest. Data were obtai…
Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target
Martin Magnusona, Lina Tengdelius, Grzegorz Greczynski +7
We investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 oC as well as the influence of the sputtering power at 8…
Electronic Structure of Beta-Ta Films from X-ray Photoelectron Spectroscopy and First-principles Calculations
Martin Magnuson, Grzegorz Greczynski, Fredrik Eriksson +2
The electronic structure and chemical bonding of Beta-Ta synthesized as a thin 001-oriented film (space group P421m) is investigated by 4f core level and valence band X-ray photoel…
Effect of impurities on morphology and growth mode of (111) and (001) epitaxial-like ScN films
Arnaud le Febvrier, Nina Tureson, Nina Stilkerich +2
ScN material is an emerging semiconductor with an indirect bandgap. It has attracted attention for its thermoelectric properties, use as seed layers, and for alloys for piezoelectr…