192 citations · 1.7k across the 79 of their papers we have counts for
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Accuracy of the Explicit Energy-Conserving Particle-in-Cell Method for Under-resolved Simulations of Capacitively Coupled Plasma Discharges
Andrew T. Powis, Igor D. Kaganovich
The traditional explicit electrostatic momentum-conserving Particle-in-cell algorithm requires strict resolution of the electron Debye length to deliver numerical accuracy. The exp…
Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies
Saurabh Simha, Sarveshwar Sharma, Alexander Khrabrov +3
The effect of driving frequency in the range of 13.56 MHz to 73 MHz on electron energy distribution and electron heating modes in a 50 mTorr capacitively coupled argon plasma disch…
Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices
Haomin Sun, Soham Banerjee, Sarveshwar Sharma +5
Achieving large-scale kinetic modelling is a crucial task for the development and optimization of modern plasma devices. With the trend of decreasing pressure in applications such…
Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges
Liang Xu, Haoming Sun, Denis Eremin +4
In this work, the rotating spoke mode in the radio frequency (RF) magnetron discharge, which features the potential hump and the RF-modulated ionization, is observed and analyzed b…
Generation of energetic electrons by surface waves in VHF CCPs
D. Eremin, E. Kemaneci, M. Matsukuma +3
Capacitively coupled plasmas (CCP) comprise one of the main tool in active use in the plasma processing industry. However, increasing the driving frequency and electrode size is li…