2 papers
physics.plasm-ph2025
Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation
Rui-Ji Tang, Shu-Xia Zhao, Yu Tian
In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximat…
physics.plasm-ph2025
Discharge structure hierarchy of highly electronegative plasma and the implication on nuclear fusion at low pressure and quasi-cold ions approximation
Yuanhe Sun, Shuxia Zhao, Ruiji Tang +1
In this paper, the discharge structure of an Ar/SF6 inductively coupled plasma (ICP) at the low pressure, 10 mTorr, is investigated by the fluid simulation at the quasi-cold ions a…