Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation
arXiv:2509.04728
Abstract
In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude.
arXiv commentarXiv admin note: substantial text overlap with arXiv:2502.16452