4 papers
Wafer-Scale Squeezed-Light Chips
Shuai Liu, Kailu Zhou, Yuheng Zhang +4
Squeezed-light generation in photonic integrated circuits (PICs) is essential for scalable continuous-variable (CV) quantum information processing. By suppressing quantum fluctuati…
Hybrid Scandium Aluminum Nitride/Silicon Nitride Integrated Photonic Circuits
Jiangnan Liu, Shuai Liu, Abdur-Raheem Al-Hallak +5
Scandium-doped aluminum nitride has recently emerged as a promising material for quantum photonic integrated circuits (PICs) due to its unique combination of strong second-order no…
Ultralow-loss photonic integrated chips on 8-inch anomalous-dispersion SiN-SiO-Si Wafer
Shuai Liu, Matthew W. Puckett, Jianfeng Wu +3
We report the fabrication of 8-inch crack-free, dispersion-engineered SiN-SiO-Si wafers fully compatible with industrial foundry silicon photonics fabrication lines. By…
Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching
Shuai Liu, Yuheng Zhang, Abdulkarim Hariri +2
Silicon nitride (SiN) photonic integrated circuits (PICs) have emerged as a versatile platform for a wide range of applications, such as nonlinear optics, narrow-linewidth…