76 citations · 99 across the 5 of their papers we have counts for
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physics.app-ph2017
On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency
Meiyong Liao, Liwen Sang, Tokuyuki Teraji +2
The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in…
cond-mat.mtrl-sci2017
Interfacial energy barrier height of AlO/H-terminated (111) diamond heterointerface investigated by X-ray photoelectron spectroscopy
Aurélien Maréchal, Yukako Kato, Meiyong Liao +1
The interfacial band configuration of the high-k dielectric AlO deposited at 120°C by atomic layer deposition (ALD) on boron- and phosphorus-doped hydrogen-terminated (111)…