Interfacial energy barrier height of Al${}_2$O${}_3$/H-terminated (111) diamond heterointerface investigated by X-ray photoelectron spectroscopy

Abstract

The interfacial band configuration of the high-k dielectric Al${}_2$O${}_3$ deposited at 120°C by atomic layer deposition (ALD) on boron- and phosphorus-doped hydrogen-terminated (111) diamond was investigated. Performing X-ray photoelectron spectroscopy measurements of core level binding energies and valence band maxima values, the valence band offsets of both heterojunctions are concluded to be ΔE${}_V$ = 1.8 eV and ΔE${}_V$ = 2.7 eV for the Al${}_2$O${}_3$/H(111)p and the Al${}_2$O${}_3$/H(111)n respectively. The ALD Al${}_2$O${}_3$ bandgap energy was measured from the O 1s photoelectron energy loss spectra to be $E_G^{A{l}_2{O}_3}$ = 7.1 eV. The interfacial band diagram configuration is concluded to be of type II for both Al${}_2$O${}_3$/H(111)p and Al${}_2$O${}_3$/H(111)n heterostructures having conduction band offsets of ΔE${}_C$ = 0.2 eV and ΔE${}_C$ = 1.1 eV respectively. The use of doped (111) hydrogen-terminated diamond for developing future diamond MOSFET is discussed.