CMOS compatibility 1coplanar waveguide 1fabrication process 1superconducting resonators 1titanium nitride 1two-level system loss 1
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quant-ph2026
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
The paper investigates how deposition conditions, etching power, and resist‑strip temperature influence the performance of superconducting titanium nitride coplanar waveguide reson…
quant-ph2026
Stability studies on subtractively-fabricated CMOS-compatible superconducting transmon qubits
Chawki Dhieb, Johannes Weber, Samuel Taubenberger +12
Developing fault-tolerant quantum processors with error correction demands large arrays of physical qubits whose key performance metrics (coherence times, control fidelities) must…