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CMOS compatibility 1coplanar waveguide 1fabrication process 1superconducting resonators 1titanium nitride 1two-level system loss 1

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quant-ph2026

Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes

Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10

The paper investigates how deposition conditions, etching power, and resist‑strip temperature influence the performance of superconducting titanium nitride coplanar waveguide reson…