most citedTopography preserved microwave plasma etching for top-down layer engineering in MoS2 and other van der Waals materials

23 citations · 23 across the 1 of their papers we have counts for

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cond-mat.mes-hall2016★ 23 cited

Topography preserved microwave plasma etching for top-down layer engineering in MoS2 and other van der Waals materials

Abin Varghese, Chithra H. Sharma and, Madhu Thalakulam

A generic and universal layer engineering strategy for van der Waals (vW) materials, scalable and compatible with the current semiconductor technology is of paramout importance in…