49 citations · 83 across the 5 of their papers we have counts for
3 papers · 1 filter
Measuring roughness of buried interfaces by sputter depth profiling
S. V. Baryshev, J. A. Klug, A. V. Zinovev +3
In this communication, we report results of a high resolution sputter depth profiling analysis of a stack of 16 alternating MgO and ZnO nanolayers grown by atomic layer deposition…
High resolution SIMS depth profiling of nanolayers
S. V. Baryshev, A. V. Zinovev, C. E. Tripa +4
We report results of high-resolution TOF SIMS (time of flight secondary ion mass spectrometry) depth profiling experiments on a nanolayered structure, a stack of 16 alternating MgO…
White Light Interferometry for Quantitative Surface Characterization in Ion Sputtering Experiments
S. V. Baryshev, A. V. Zinovev, C. E. Tripa +2
White light interferometry (WLI) can be used to obtain surface morphology information on dimensional scale of millimeters with lateral resolution as good as ~1 μm and depth resolut…