88 citations · 209 across the 7 of their papers we have counts for
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physics.plasm-ph2016★ 41 cited
A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
M. Daksha, B. Berger, E. Schuengel +5
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients (-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This…
physics.plasm-ph2016★ 4 cited
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schuengel, Z. Donko, P. Hartmann +3
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The…
physics.plasm-ph2016
The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
J. Schulze, Z. Donko, A. Derzsi +2
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an an…