Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N${}_2$ mixtures

Ihor Korolov, Zoltán Donkó, Gerrit Hübner +3

Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmosp…