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20132021
most citedExpansion and fragmentation of liquid metal droplet by a short laser pulse

47 citations · 129 across the 6 of their papers we have counts for

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Showing 2013 · physics.plasm-phShow all

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physics.plasm-ph2013★ 47 cited

Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas

A Dolgov, D Lopaev, T Rachimova +6

Cleaning of contamination of optical surfaces by amorphous carbon (a-C) is highly relevant for extreme ultraviolet (EUV) lithography. We have studied the mechanisms for a-C removal…