In situ Al${}_2$O${}_3$ passivation of epitaxial tantalum and aluminum films enables long-term stability in superconducting microwave resonators

Yi-Ting Cheng, Hsien-Wen Wan, Wei-Jie Yan +10

Long-term stability of superconducting microwave resonators is essential for scalable quantum technologies; however, surface and interface degradation continue to limit device stab…