178 citations · 522 across the 11 of their papers we have counts for
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cs.DS2016
Capacity Planning for Cluster Tools in the Semiconductor Industry
Martin Romauch, Richard F. Hartl
This paper proposes a new model for Cluster-tools with two load locks. Cluster-tools are widely used to automate single wafer processing in semiconductor industry. The load locks a…
math.OC2016★ 145 cited
Workload Equity in Vehicle Routing Problems: A Survey and Analysis
Piotr Matl, Richard F. Hartl, Thibaut Vidal
Over the past two decades, equity aspects have been considered in a growing number of models and methods for vehicle routing problems (VRPs). Equity concerns most often relate to f…