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Integrated gallium phosphide nonlinear photonics
Dalziel J. Wilson, Katharina Schneider, Simon Hoenl +3
Gallium phosphide (GaP) is an indirect bandgap semiconductor used widely in solid-state lighting. Despite numerous intriguing optical properties---including large and $χ^…
Highly selective dry etching of GaP in the presence of AlGaP
Simon Hönl, Herwig Hahn, Yannick Baumgartner +2
We present an inductively coupled-plasma reactive-ion etching process that simultaneously provides both a high etch rate and unprecedented selectivity for gallium phosphide (GaP) i…
Gallium phosphide-on-silicon dioxide photonic devices
Katharina Schneider, Pol Welter, Yannick Baumgartner +3
The development of integrated photonic circuits utilizing gallium phosphide requires a robust, scalable process for fabrication of GaP-on-insulator devices. Here we present the fir…