182 citations · 726 across the 43 of their papers we have counts for
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cs.OH2018
OpenMPL: An Open Source Layout Decomposer
Wei Li, Yuzhe Ma, Qi Sun +4
Multiple patterning lithography has been widely adopted in advanced technology nodes of VLSI manufacturing. As a key step in the design flow, multiple patterning layout decompositi…
cs.LG2018★ 6 cited
Data Efficient Lithography Modeling with Transfer Learning and Active Data Selection
Yibo Lin, Meng Li, Yuki Watanabe +4
Lithography simulation is one of the key steps in physical verification, enabled by the substantial optical and resist models. A resist model bridges the aerial image simulation to…