65 citations · 283 across the 25 of their papers we have counts for
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physics.app-ph2023★ 4 cited
Study of Surface Damage in Silicon by Irradiation with Focused Rubidium Ions
S. Xu, Y. Li, M. A. Verheijen +2
Cold atom ion sources have been developed and commercialized as alternative sources for focused ion beams (FIB). So far, applications and related research have not been widely repo…
physics.app-ph2022★ 8 cited
Rubidium Focused Ion Beam Induced Platinum Deposition
Yang Li, Sheng Xu, Meltem Sezen +2
This work presents characterization of focused ion beam induced deposition (FIBID) of platinum using both rubidium and gallium ions. Under similar beam energies, 8.5 keV for Rb…
physics.app-ph2022★ 8 cited
Investigation of Rb Milling Rates using an Ultracold Focused Ion Beam
Sheng Xu, Yang Li, Edgar Vredenbregt
Several ion source alternatives for current focused ion beam (FIB) systems have been studied to achieve higher brightness, including cold atom ion sources. However, a study of ultr…