Ultrashort Pulse Laser Annealing of Amorphous Atomic Layer Deposited MoS${}_2$ Films

Malte J. M. J. Becher, Julia Jagosz, Rahel-Manuela Neubieser +6

Thin films of molybendum disulfide grown via thermal atomic layer deposition at low temperatures, suitable for temperature sensible substrates, can be amorphous. To avoid a high te…