662 citations · 1k across the 13 of their papers we have counts for
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cond-mat.mtrl-sci2014★ 53 cited
Sub 20 nm Silicon Patterning and Metal Lift-Off Using Thermal Scanning Probe Lithography
Heiko Wolf, Colin Rawlings, Philipp Mensch +4
The most direct definition of a patterning process' resolution is the smallest half-pitch feature it is capable of transferring onto the substrate. Here we demonstrate that thermal…
cond-mat.soft2014★ 25 cited
Enhancing ordering dynamics in solvent-annealed block-copolymer films by lithographic hard masks supports
Anja Stenbock-Fermor, Armin W. Knoll, Alexander Böker +1
We studied solvent-driven ordering dynamics of block copolymer films supported by a densely cross-linked polymer network designed as organic hard mask (HM) for lithographic fabrica…