32 citations · 117 across the 8 of their papers we have counts for
7 papers · 1 filter
On the electron energy distribution function in the high power impulse magnetron sputtering discharge
Martin Rudolph, A. Revel, D. Lundin +6
We apply the Ionization Region Model (IRM) and the Orsay Boltzmann equation for ELectrons coupled with Ionization and eXcited states kinetics (OBELIX) model to study the electron k…
Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO film growth
Robert Franz, César Clavero, Jonathan Kolbeck +1
The ion energies and fluxes in the high power impulse magnetron sputtering plasma from a Nb target were analysed angularly resolved along the tangential direction of the racetrack.…
Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas
Koichi Tanaka, Liang Han, Xue Zhou +1
Charge-state-resolved ion energy-time-distributions of pulsed Cu arc plasma were obtained by using direct (time dependent) acquisition of the ion detection signal from a commercial…
Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
Robert Franz, Peter Polcik, André Anders
The energy distribution functions of ions in the cathodic arc plasma using composite AlCr cathodes were measured as a function of the background gas pressure in the range 0.5 to 3.…
Drifting Ionization Zone in Sputtering Magnetron Discharges at Very Low Currents
André Anders, Pavel Ni, Joakim Andersson
Discharges with crossed electric and magnetic fields are known to develop instabilities that are crucial in the transport of charged particles. Sputtering magnetrons are no excepti…
Unusual Cathode Erosion Patterns Observed for Steered Arc Sources
Jonathan Kolbeck, André Anders
A cathodic arc source with a magnetron-type magnetic field was investigated for stability, erosion, and compatibility with a linear macroparticle filter. Here we report about unusu…
Smoothing of Discharge Inhomogeneities at High Currents in Gasless High Power Impulse Magnetron Sputtering
Joakim Andersson, Pavel Ni, André Anders
The discharges in high power impulse magnetron sputtering (HiPIMS) have been reported to consist of azimuthally inhomogeneous plasma with locally increased light emission. The lumi…