1 citations · 1 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2019
Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions
Dmitry Kalanov, André Anders, Carsten Bundesmann
The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam para…
physics.plasm-ph2015★ 1 cited
Adding high time resolution to charge-state-specific ion energy measurements for pulsed copper vacuum arc plasmas
Koichi Tanaka, Liang Han, Xue Zhou +1
Charge-state-resolved ion energy-time-distributions of pulsed Cu arc plasma were obtained by using direct (time dependent) acquisition of the ion detection signal from a commercial…