783 citations · 862 across the 13 of their papers we have counts for
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Benchmark of Rigorous Methods for Electromagnetic Field Simulations
S. Burger, L. Zschiedrich, F. Schmidt +2
We have developed an interface which allows to perform rigorous electromagnetic field (EMF) simulations with the simulator JCMsuite and subsequent aerial imaging and resist simulat…
Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures
S. Burger, B. H. Kleemann, L. Zschiedrich +1
Light transmission through circular subwavelength apertures in metallic films with surrounding nanostructures is investigated numerically. Numerical results are obtained with a fre…
Accurate simulation of light transmission through subwavelength apertures in metal films
D. Lockau, L. Zschiedrich, S. Burger
We use the finite-element method for simulating light transmission through a 2D-periodic array of rectangular apertures in a film of highly conductive material. We report results w…
Finite Element Simulation of Light Propagation in Non-Periodic Mask Patterns
L. Zschiedrich, F. Schmidt
Rigorous electromagnetic field simulations are an essential part for scatterometry and mask pattern design. Today mainly periodic structures are considered in simulations. Non-peri…
A Rigorous Finite-Element Domain Decomposition Method for Electromagnetic Near Field Simulations
L. Zschiedrich, S. Burger, A. Schädle +1
Rigorous computer simulations of propagating electromagnetic fields have become an important tool for optical metrology and design of nanostructured optical components. A vectorial…
Electromagnetic Field Simulations of Isolated and Periodic 3D Photomask Patterns
S. Burger, L. Zschiedrich, F. Schmidt +3
We present rigorous 3D EMF simulations of isolated features on photomasks using a newly developed finite-element method. We report on the current status of the finite-element solve…