Method for fast computation of angular light scattering spectra from 2D periodic arrays
arXiv:1603.04169 · doi:10.1117/12.2219666
Abstract
An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.
arXiv commentProceedings article, SPIE conference "Metrology, Inspection, and Process Control for Microlithography XXX"
References in corpus (6)
- Adaptive Finite Element Method for Simulation of Optical Nano Structures
- Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nano antennas
- Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures
- Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
- Reduced basis method for source mask optimization
- Advanced finite-element methods for design and analysis of nanooptical structures: Applications