783 citations · 3.4k across the 97 of their papers we have counts for
Showing 2006 · physics.opticsShow all
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physics.optics2006★ 6 cited
Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters
J. Pomplun, S. Burger, F. Schmidt +4
We present rigorous simulations of EUV masks with technological imperfections like side-wall angles and corner roundings. We perform an optimization of two different geometrical pa…
physics.optics2006★ 13 cited
Rigorous Simulation of 3D Masks
S. Burger, R. Köhle, L. Zschiedrich +4
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size…
physics.optics2006★ 20 cited
Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation
S. Burger, R. Köhle, L. Zschiedrich +4
An extremely fast time-harmonic finite element solver developed for the transmission analysis of photonic crystals was applied to mask simulation problems. The applicability was pr…