783 citations · 3.4k across the 97 of their papers we have counts for
13 papers · 1 filter
Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions
Matthias Plock, Martin Hammerschmidt, Sven Burger +2
In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical mod…
Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators
Felix Binkowski, Fridtjof Betz, Martin Hammerschmidt +3
Resonances are omnipresent in physics and essential for the description of wave phenomena. We present an approach for computing eigenfrequency sensitivities of resonances. The theo…
Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction
Matthias Plock, Kas Andrle, Sven Burger +1
Parameter reconstructions are indispensable in metrology. Here, the objective is to to explain experimental measurements by fitting to them a parameterized model of the measure…
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Matthias Plock, Sven Burger, Philipp-Immanuel Schneider
Parameter reconstruction is a common problem in optical nano metrology. It generally involves a set of measurements, to which one attempts to fit a numerical model of the measureme…
Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures
Xavier Garcia-Santiago, Sven Burger, Carsten Rockstuhl +1
We propose the combination of forward shape derivatives and the use of an iterative inversion scheme for Bayesian optimization to find optimal designs of nanophotonic devices. This…
Using Gaussian process regression for efficient parameter reconstruction
Philipp-Immanuel Schneider, Martin Hammerschmidt, Lin Zschiedrich +1
Optical scatterometry is a method to measure the size and shape of periodic micro- or nanostructures on surfaces. For this purpose the geometry parameters of the structures are obt…