Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
arXiv:1707.08467 · doi:10.1117/12.2270596
Abstract
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
Proceedings article, SPIE conference "Modeling Aspects in Optical Metrology VI"