12 citations · 40 across the 4 of their papers we have counts for
4 papers
Efficient Bayesian inversion for shape reconstruction of lithography masks
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Background: Scatterometry is a fast, indirect and non-destructive optical method for quality control in the production of lithography masks. To solve the inverse problem in complia…
An efficient approach to global sensitivity analysis and parameter estimation for line gratings
Nando Farchmin, Martin Hammerschmidt, Philipp-Immanuel Schneider +4
Scatterometry is a fast, indirect and nondestructive optical method for the quality control in the production of lithography masks. Geometry parameters of line gratings are obtaine…
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
M. Hammerschmidt, M. Weiser, X. Garcia Santiago +3
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where w…
Fast simulation method for parameter reconstruction in optical metrology
S. Burger, L. Zschiedrich, J. Pomplun +2
A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a nume…