12 citations · 20 across the 2 of their papers we have counts for
2 papers
physics.comp-ph2017★ 8 cited
Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
M. Hammerschmidt, M. Weiser, X. Garcia Santiago +3
We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where w…
physics.optics2013★ 12 cited
Fast simulation method for parameter reconstruction in optical metrology
S. Burger, L. Zschiedrich, J. Pomplun +2
A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a nume…