most citedGrowth Kinetic studies of ion beam sputtered AlN-thin films: Effect of reactive assistance of nitrogen plasma

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cond-mat.mtrl-sci2014★ 15 cited

Growth Kinetic studies of ion beam sputtered AlN-thin films: Effect of reactive assistance of nitrogen plasma

Neha Sharma, K. Prabhakar, S. Ilango +2

Reactive dual ion beam sputter deposition of AlN thin films was carried out for the analysis of surface growth characteristics by Atomic Force Microscopy. The variation of roughnes…