most citedSubstrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition

94 citations · 94 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2014★ 94 cited

Substrate-assisted nucleation of ultra-thin dielectric layers on graphene by atomic layer deposition

Bruno Dlubak, Piran R. Kidambi, Robert S. Weatherup +2

We report on a large improvement in the wetting of Al2O3 thin films grown by un-seeded atomic layer deposition on monolayer graphene, without creating point defects. This enhanced…