27 citations · 30 across the 2 of their papers we have counts for
2 papers
physics.optics2012★ 27 cited
Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry
A. Kato, S. Burger, F. Scholze
The influence of edge roughness in angle resolved scatterometry at periodically structured surfaces is investigated. A good description of the radiation interaction with structured…
physics.optics2011★ 3 cited
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
S. Burger, L. Zschiedrich, J. Pomplun +4
EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry…