103 citations · 227 across the 9 of their papers we have counts for
3 papers · 1 filter
A model for atomic precision p-type doping with diborane on Si(100)-21
Quinn Campbell, Jeffrey A. Ivie, Ezra Bussmann +3
Diborane (BH) is a promising molecular precursor for atomic precision p-type doping of silicon that has recently been experimentally demonstrated [T. {Š}kere{ň}, \textit{et…
Atomic Precision Advanced Manufacturing for Digital Electronics
Daniel R. Ward, Scott W. Schmucker, Evan M. Anderson +8
An exponential increase in the performance of silicon microelectronics and the demand to manufacture in great volumes has created an ecosystem that requires increasingly complex to…
Low Thermal Budget High-k/Metal Surface Gate for Buried Donor-Based Devices
Evan M. Anderson, DeAnna M. Campbell, Leon N. Maurer +8
Atomic precision advanced manufacturing (APAM) offers creation of donor devices in an atomically thin layer doped beyond the solid solubility limit, enabling unique device physics.…