103 citations · 227 across the 9 of their papers we have counts for
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physics.app-ph2025★ 3 cited
Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication
E. M. Anderson, C. R. Allemang, A. J. Leenheer +13
Atomic precision advanced manufacturing (APAM) dopes silicon with enough carriers to change its electronic structure and can be used to create novel devices by defining metallic re…
physics.app-ph2020★ 17 cited
Atomic Precision Advanced Manufacturing for Digital Electronics
Daniel R. Ward, Scott W. Schmucker, Evan M. Anderson +8
An exponential increase in the performance of silicon microelectronics and the demand to manufacture in great volumes has created an ecosystem that requires increasingly complex to…