most citedVariable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants

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cond-mat.mtrl-sci2013★ 22 cited

Variable resistor made by repeated steps of epitaxial deposition and lithographic structuring of oxide layers by using wet chemical etchants

Dieter Weber, Róza Vöfély, Yuehua Chen +2

Variable resistors were constructed from epitaxial SrRuO3 (SRO), La0.67Sr0.33MnO3 (LSMO) and SrTiO3 layers with perovskite crystal structure. Each layer was patterned separately by…