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Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al-AlOx/Nb Josephson Junctions for VLSI Circuits
Sergey K. Tolpygo, Vladimir Bolkhovsky, Terence J. Weir +3
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is…
Flux qubit noise spectroscopy using Rabi oscillations under strong driving conditions
Fumiki Yoshihara, Yasunobu Nakamura, Fei Yan +4
We infer the high-frequency flux noise spectrum in a superconducting flux qubit by studying the decay of Rabi oscillations under strong driving conditions. The large anharmonicity…
Shadow evaporation of epitaxial Al/Al2O3/Al tunnel junctions on sapphire utilizing an inorganic bilayer mask
Paul B. Welander, Vladimir Bolkhovsky, Terence J. Weir +2
This letter describes a new inorganic shadow mask that has been employed for the evaporation of all-epitaxial Al/Al2O3/Al superconducting tunnel junctions. Organic resists that are…
Spectroscopy of low-frequency noise and its temperature dependence in a superconducting qubit
Fei Yan, Jonas Bylander, Simon Gustavsson +7
We report a direct measurement of the low-frequency noise spectrum in a superconducting flux qubit. Our method uses the noise sensitivity of a free-induction Ramsey interference ex…
Sub-micrometer epitaxial Josephson junctions for quantum circuits
Jeffrey S. Kline, Michael R. Vissers, Fabio C. S. da Silva +11
We present a fabrication scheme and testing results for epitaxial sub-micrometer Josephson junctions. The junctions are made using a high-temperature (1170 K) "via process" yieldin…
Noise correlations in a flux qubit with tunable tunnel coupling
Simon Gustavsson, Jonas Bylander, Fei Yan +3
We have measured flux-noise correlations in a tunable superconducting flux qubit. The device consists of two loops that independently control the qubit's energy splitting and tunne…