27 citations · 28 across the 2 of their papers we have counts for
2 papers
cond-mat.supr-con2023★ 27 cited
Progress toward superconductor electronics fabrication process with planarized NbN and NbN/Nb layers
Sergey K. Tolpygo, Justin L. Mallek, Vladimir Bolkhovsky +5
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of Josephson junctions (JJs) per chip, we developed a new fabricat…
cond-mat.supr-con2012★ 1 cited
Shadow evaporation of epitaxial Al/Al2O3/Al tunnel junctions on sapphire utilizing an inorganic bilayer mask
Paul B. Welander, Vladimir Bolkhovsky, Terence J. Weir +2
This letter describes a new inorganic shadow mask that has been employed for the evaporation of all-epitaxial Al/Al2O3/Al superconducting tunnel junctions. Organic resists that are…