3 papers
eess.SP2026
Information-Theoretic Causal Modelling of Semiconductor Process Dynamics
Daniel Sørensen, Giorgio Melchiorre, Sudip Bandyopadhyay +3
With the progress of the semiconductor industry toward increasingly complex compute devices and tighter process tolerances, advanced process control has become crucial. This work e…
cs.LG2025
Unsupervised Anomaly Prediction with N-BEATS and Graph Neural Network in Multi-variate Semiconductor Process Time Series
Daniel Sorensen, Bappaditya Dey, Minjin Hwang +1
Semiconductor manufacturing is an extremely complex and precision-driven process, characterized by thousands of interdependent parameters collected across diverse tools and process…
cs.LG2025
Continuous Wavelet Transform and Siamese Network-Based Anomaly Detection in Multi-variate Semiconductor Process Time Series
Bappaditya Dey, Daniel Sorensen, Minjin Hwang +1
Semiconductor manufacturing is an extremely complex process, characterized by thousands of interdependent parameters collected across diverse tools and process steps. Multi-variate…