In situ GaN decomposition analysis by quadrupole mass spectrometry and reflection high-energy electron diffraction

S. Fernández-Garrido, G. Koblmüller, E. Calleja +1

Thermal decomposition of wurtzite (0001)-oriented GaN was analyzed: in vacuum, under active N exposure, and during growth by rf-plasma assisted molecular beam epitaxy. The GaN deco…