most citedThe Integration of High-k Dielectric on Two-Dimensional Crystals by Atomic Layer Deposition

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cond-mat.mes-hall2012★ 172 cited

The Integration of High-k Dielectric on Two-Dimensional Crystals by Atomic Layer Deposition

Han Liu, Kun Xu, Xujie Zhang +1

We investigate the integration of Al2O3 high-k dielectric on two-dimensional (2D) crystals of boron nitride (BN) and molybdenum disulfide (MoS2) by atomic layer deposition (ALD). W…