most citedExtreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

21 citations · 23 across the 2 of their papers we have counts for

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physics.ins-det2013★ 2 cited

IRIDE White Book, An Interdisciplinary Research Infrastructure based on Dual Electron linacs&lasers

D. Alesini, M. Alessandroni, M. P. Anania +211

This report describes the scientific aims and potentials as well as the preliminary technical design of IRIDE, an innovative tool for multi-disciplinary investigations in a wide fi…