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G. Gallerano

2 papers hereh-index 242.7k citations227 works total

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author position
  • middle author2

Across the 2 of 2 papers where every author was matched, so the position is known.

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  • physics.acc-ph1
  • physics.ins-det1

identity via Semantic Scholar / OpenAlex

most citedExtreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

21 citations · 23 across the 2 of their papers we have counts for

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1 paper · 1 filter

physics.acc-ph2001★ 21 cited

Extreme Ultraviolet (EUV) Sources for Lithography based on Synchrotron Radiation

G. Dattoli, A. Doria, G. P. Gallerano +9

The study presented here was initiated by a discussion to investigate the possibility of using synchrotron radiation as a source for the Next Generation Lithography (NGL) based on…

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Not affiliated with arXiv. Researcher data from Semantic Scholar (ODC-BY) and OpenAlex.