102 citations · 226 across the 4 of their papers we have counts for
4 papers
Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas
Yong-Xin Liu, Edmund Schuengel, Ihor Korolov +3
Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time…
Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
E. Schuengel, Z. Donko, P. Hartmann +3
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The…
Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
A. Derzsi, I. Korolov, E. Schuengel +2
In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs) several simplifications are made: (i) fast neutrals are not traced, (ii) heavy particle induced e…
Transport control of dust particles via the Electrical Asymmetry Effect: experiment, simulation, and modeling
Shinya Iwashita, Edmund Schüngel, Julian Schulze +6
The control of the spatial distribution of micrometer-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically,…