Controlling a three dimensional electron slab of graded Al${}_x$Ga${}_{1-x}$N

R. Adhikari, Tian Li, G. Capuzzo +1

Polarization induced degenerate $n$-type doping with electron concentrations up to $\sim$10${}^{20}$\,cm${}^{-3}$ is achieved in graded Al${}_x$Ga${}_{1-x}$N layers ($x$: 0\%$\rightarrow…