2 papers
physics.optics2022
Using electrical resistance asymmetries to infer the geometric shapes of foundry patterned nanophotonic structures
Vinita Mittal, Krishna C. Balram
While silicon photonics has leveraged the nanofabrication tools and techniques from the microelectronics industry, it has also inherited the metrological methods from the same. Pho…
physics.optics2017
Enhancement of bulk second-harmonic generation from silicon nitride films by material composition
K. Koskinen, R. Czaplicki, A. Slablab +8
We present a comprehensive tensorial characterization of second-harmonic generation from silicon nitride films with varying composition. The samples were fabricated using plasma-en…